Senate Bill No. 0506-11
UNIVERSITY SENATE
UNIVERSITY AT ALBANY
STATE UNIVERSITY OF NEW YORK
Introduced by:
Graduate Academic Council
Date:
December 2005
PROPOSAL TO AMEND Ph.D. & M.S. PROGRAMS
COLLEGE OF NANOSCALE SCIENCE & ENGINEERING
IT IS HEREBY PROPOSED THAT THE FOLLOWING BE ADOPTED:
1.
That the University Senate approve the attached Proposal to Revise Existing
Graduate Academic Programs in NanoScience & NanoEngineering as approved
by the Graduate Academic Council.
2.
That this proposal be forwarded to the President for approval.
State University of New York
Proposed Revision of Existing Graduate Academic Program
1)
Current SED classification:
Campus: University at Albany – SUNY
Academic Unit: College of Nanoscale Science & Engineering (CNSE)
Name of program: Nanosciences & Nanoengineering
Award: Ph.D. & M.S.
SED Program codes: 28095 & 28096
HEGIS: Materials Engineering 0915
Certification/licensure: none
2)
Summary of and Rationale for Revision of Existing Graduate Academic Program in
Nanosciences and Nanoengineering
Summary of change:
It is proposed that the existing graduate program, Nanosciences and Nanoengineering, currently offering
the degrees of Ph.D. and M.S. within the College of Nanoscale Science and Engineering, be revised.
Specifically, it is proposed that the Science and Engineering components of the current program be
separated into distinct Nanoscale Science and Nanoscale Engineering degree programs and that the current
Nanoscience and Nanoengineering concentration areas be expanded in number and separated into formal
tracks within the Nanoscale Science and Nanoscale Engineering degree programs. In addition, it is
proposed to establish a unifying and cross-disciplinary “Foundations of Nanotechnology” course sequence
to serve both the Nanoscale Science and Nanoscale Engineering programs and replace the current core-
course sequence in the Nanoscience and Nanoengineering graduate degree program.
Rationale for change:
The University at Albany’s College of Nanoscale Science and Engineering – the nation’s first college in
nanoscale science and technology – has evolved into an internationally recognized center for research in
nanoscale science, nanoscale engineering, and nanotechnology due to its eminently successful model for
collaboration between industry, government, and academia. From an initial enrollment of 10 graduate
students in Nanosciences and Nanoengineering degree program in the inaugural Fall 2003 semester, CNSE
has welcomed over 80 graduate students for the Fall 2005 semester. The substantial success of the
Nanoengineering and Nanosciences degree program relies on the expectation that the University in general
and the CNSE in particular will continue to perform the critical function of providing an education to our
students of the highest quality equal or superior to that available in institutions of higher learning anywhere
in the world.
The rapid expansion of the graduate student clientele served by the CNSE and the Nanoscience and
Nanoengineering degree program has been accompanied by parallel increases in faculty, administrative and
technical staff, and most notably, the CNSE’s research and development infrastructure and the associated
portfolio of sponsored research programs. As the national and international leadership of the CNSE in the
fields of Nanoscale Science and Nanoscale Engineering is advanced it is appropriate to further mature and
expand the curricular offerings made available to its students. Consequently a revision in the CNSE
curricular offerings has been advanced by the Faculty and Administration of the CNSE as part of their
collective obligations to participate significantly in the initiation, development, and implementation of
CNSE Educational, Research, Service and Outreach programs.
This revision in the CNSE curricular offerings also responds to the national and international need for the
“…establishment of an infrastructure capable of educating and training an adequate number of researchers,
teachers, and technical workers in nanotechnology,” as recently noted by the President’s Council of
Advisors on Science and Technology.1
Likewise, the proposed changes will further enhance the interdisciplinary educational environment that our
students must have if they are to develop into the leaders in the fields of nanotechnology. As noted by
Uddin and Raj Chowdhury, “Nanotechnology is truly interdisciplinary. An interdisciplinary curriculum that
encompasses a broad understanding of basic sciences intertwined with engineering sciences and
information sciences pertinent to nanotechnology is essential.”2 This is precisely in accord with the
National Nanotechnology Initiative, which has declared that “a well-educated citizenry, skilled workforce,
and a supporting infrastructure of instrumentation, equipment, and facilities are essential foundations of the
NNI”.3 Our proposed curriculum revisions closely parallel this sentiment.
Rationale for Degree Separation: As noted above, one focus of the revision is a separation of the Science
and Engineering components of the current Nanoscience and Nanoengineering program into distinct
Nanoscale Science and Nanoscale Engineering degree programs. This bifurcation will formalize the
distinction between science and engineering tracks incorporated into the current program and more
effectively service the present and future CNSE graduate clientele. The Nanoscale Science program will
provide the critical theoretical and experimental skill base and know-how for knowledge creation in the
areas of nanoscale materials, structures, and architectures. The Nanoscale Engineering program will
provide corresponding skill and expertise in the design, fabrication, and integration of nanoscale devices,
structures, and systems for the development and deployment of emerging nanotechnologies. This revision
reflects and is motivated by the significant increase in CNSE faculty in both the science and engineering
fields and the unparalleled expansion of the CNSE research and development infrastructure. Equally
important it reflects the dramatic expansion and selected maturation of fields within nanoscale science and
nanoscale engineering disciplines and the pressing need for a highly skilled science and engineering
workforce demanded by those disciplines in both the public and private sectors.
This initiative to provide separate degrees in Nanoscience and in Nanoengineering is in accord with current
or emerging nanotechnology educational initiatives at major institutions including the University of
Washington, Penn State University, and Rice University.
Rationale for Track Expansion: Accompanying the separation in Nanoscale Science and Nanoscale
Engineering degree programs is a proposed expansion of the current Nanoscience and Nanoengineering
concentration areas (Molecular Materials and Architectures; Optoelectronic Materials, Architectures, and
Devices; NanoSystems Sciences and Technologies; Thin Film Single and Multilayered Material Structures;
Nanomaterials for Nanotechnology; Nanoscale Materials Modeling, Characterization, Analysis, and
Metrology) into fourteen formal tracks:
Proposed Nanoscale Science Tracks (see Appendix A for descriptions):
Molecular Materials and Architectures
Optoelectronic Materials and Architectures
Spintronic Materials and Architectures
Ultra-Thin Film Single and Multilayered Nanomaterial Structures
Nanomaterials for Nanotechnology
Nanoscale Materials Characterization, Analysis, and Metrology
Economic Impacts of Nanoscale Science and Engineering
Proposed Nanoscale Engineering Tracks (see Appendix A for descriptions):
1 The National Nanotechnology Initiative at Five Years: Assessment and Recommendations of the
National Nanotechnology Advisory Panel, pg 4, May 2005.
2 Mahbub Uddin and A. Raj Chowdhury, “Nanotechnology Education,” Proceedings of the
International Conference on Engineering Education, Oslo, Norway, 2001
3 Nanotechnology Technology Initiative: Leading to the Next Industrial Revolution (National
Science and Technology Council, Maryland, September 1999).
Nanoelectronic Engineering and Technology
Optoelectronics and Photonics Nanoengineering
Spintronics Nanoengineering
NanoSystem Engineering and Technology
NanoEngineering in Energy & Environmental Technologies
Nanolithography Engineering and Technology
Nanobiology Engineering and Technology
This expansion also reflects and is motivated by the significant increase in CNSE faculty in both the
science and engineering fields and the unparalleled expansion of the CNSE research and development
infrastructure. These tracks are essential to prepare CNSE graduates in the leading fields of nanoscale
science & engineering and nanotechnology, in general. Their foundation is firmly rooted in the current
Nanoscience and Nanoengineering program and their formulation represents the logical next step in
curricular development for the students and faculty of the CNSE.
Note: The final proposed Nanoscale Science Track: ‘Economic Impacts of Nanoscale Science and
Nanotechnology’ represents a cross-listing with curricular tracks currently under development within the
Nanoeconomics Constellation of the CNSE.
Rationale for “Foundations of Nanotechnology” course sequence: Separation of the science and
engineering components of the current CNSE degree offerings does not dilute the dedication of the CNSE
faculty to a truly interdisciplinary academic experience. Nor does it ignore the overwhelming consensus
among nanotechnology educators, researchers, and professionals that interdisciplinary is a keystone for
successful nanoscale science and engineering education. Consequently, a unique and visionary
“Foundations of Nanotechnology” course sequence is proposed to serve both the Nanoscale Science and
Nanoscale Engineering programs and replace the current core-course sequence in the Nanoscience and
Nanoengineering graduate degree programs.
“Foundations” represents a modular four-course sequence that has been specifically designed to provide the
base scientific skill set required by the varied undergraduate backgrounds of students entering CNSE. The
parallel and complementary modular platform of the “Foundations” sequence responds to the need for
simultaneous CNSE course content delivery to students possessing undergraduate degrees in Physics,
Chemistry, Materials Science, Mathematics, Biology, Chemical Engineering, Electrical Engineering, and
Mechanical Engineering. The “Foundations” sequence serves an analogous role for practicing
professionals in the fields of nanoscale science, engineering, and nanotechnology that have or plan to enroll
in CNSE degree programs.
It is the firm belief of the CNSE Faculty that the proposed alterations in the current CNSE degree program
will place CNSE at the forefront of nanoscale science, nanoscale engineering, and nanotechnology
education and will allow our College to continue to be viewed as the leading innovator in the field.
The programs affected by this proposed change do not lead to certification in classroom teaching.
3)
Curriculum outline of the current program and of the proposed revised curriculum:
I. Master's of Science (MS) in Nanoscience and Nanoengineering. Current requirements:
1.
CNSE coursework (18 credits): CNSE Courses as advised including twelve
credits of thesis research (CNSE 699).
2.
Concentration coursework (9 credits): Courses constituting a 3-course sequence
selected from one of the following sets of courses:
a.
ACHM 508, ACHM 520a, ACHM 520b, ACHM 525a, ACHM 525b,
ACHM 526 or ACHM 561
b.
APHY 510a, APHY 510b, APHY 519, APHY 532, APHY 560, APHY
562, or APHY 563
c.
CNSE 501, CNSE 511, CNSE 512, CNSE 519, CNSE 525, CNSE 528
or CNSE 541
3.
Seminar / External Courses (3 credits) as advised.
4.
Completion of an original research project that represents a significant
scientific contribution to one of the appropriate CNSE concentration areas that
leads to the submission of an acceptable Master’s thesis. If the student
successfully completes an appropriate portion of the Ph.D. written qualifying
examination, a master's research project can be substituted for the formal thesis.
I.A Proposed revision to the M.S. in Nanoscience and Nanoengineering
:
It is proposed to separate the M.S. degree program in Nanoscience and Nanoengineering into
respective M.S. degree programs in Nanoscale Science and Nanoscale Engineering.
Revised requirements for M.S. in Nanoscale Science:
1.
CNSE coursework (18 credits): Six credits as advised relevant to a CNSE Nanoscale
Science Track and twelve credits of thesis research (CNSE 699).
2.
Completion of 9 credits from the “Foundations of Nanotechnology” Course Sequence.
3.
Seminar/External Courses as advised (3 credits): unchanged
from existing M.S. requirement.
4.
Completion of an original research project that represents a significant scientific
contribution to one of the appropriate CNSE Nanoscale Science Tracks that leads to
the submission of an acceptable Master’s thesis. If the student successfully completes
an appropriate portion of the Ph.D. preliminary written examination, a master's
research project report can be substituted for the formal thesis.
I.B Proposed revision to the M.S. in Nanoscience and Nanoengineering
:
Revised requirements for M.S. in Nanoscale Engineering:
1.
CNSE coursework (18 credits): Six credits as advised relevant to a CNSE Nanoscale
Engineering Track and twelve credits of thesis research (CNSE 699).
2.
Completion of 9 credits from the “Foundations of Nanotechnology” Course Sequence.
3. Seminar/External Courses as advised (3 credits): unchanged
from existing M.S. requirement.
4.
Completion of an original research project that represents a significant scientific
contribution to one of the appropriate CNSE Nanoscale Engineering Tracks that leads
to the submission of an acceptable Master’s thesis. If the student successfully
completes an appropriate portion of the Ph.D. preliminary written examination, a
master's research project report can be substituted for the formal thesis.
II. PhD in Nanosciences and Nanoengineering. Current Requirements:
1. Students admitted with an appropriate Bachelor's degree shall complete
66 credit hours of academic coursework in partial fulfillment of the Ph.D.
degree requirements:
a. 36 credit hours in coursework at the 500 level or higher (including
coursework in the student's area of concentration).
b. 12 credit hours of seminar/external courses.
c.
18 credit hours of Ph.D. dissertation research.
d. Completion of a seven core-course sequence consisting of an
appropriate subset of the following courses: CHM 520A, CHM
520B, CHM 525A, CHM 525B, CHM 526, CHM 535A, and CHM
561; or PHY 510A, PHY 510B, PHY 519, PHY 532, PHY 560,
PHY 562, and PHY 563; or CNSE 501, CNSE 511, CNSE 512,
CNSE 519, CNSE 525, CNSE 528 and CNSE 541. The core-course
sequence is designed to accommodate multiple nanosciences
student specialization channels, including Physics and Chemistry.
2. Students admitted with an appropriate Masters of Science degree shall
complete 36 credit hours of academic coursework in partial fulfillment of
the Ph.D. degree requirements:
a. 15 credit hours in coursework at the 500 level or higher (including
coursework in the student's area of concentration).
b. 6 credit hours of seminar/external courses.
c.
15 credit hours of Ph.D. dissertation research.
d. Completion of the core-courses listed above for which the student
did not receive course equivalency upon matriculation into the
Ph.D. program.
3. Qualifying Written Examination for Formal Admission to the Ph.D.
program: Admission to the CNSE Ph.D. program requires successful
completion of a qualifying written examination covering materials
nanoscience, nanoengineering and basic nanoscience applications. The
exam will be offered yearly and must be passed within two attempts to
maintain academic standing in the CNSE Ph.D. program.
4. Preliminary Oral Examination for completion of the Ph.D. degree:
Normally, within 2 semesters of passing the qualifying written
examination, students in the CNSE Ph.D. program must take and pass a
preliminary oral examination relevant to a CNSE concentration area.
Successful completion of the preliminary oral examination is determined
by a five-member oral examination committee. This committee consists of
at least three members of the CNSE faculty (including the student's
advisor) and at least one outside member (University at Albany faculty
outside CNSE, or CNSE research partner). Upon passing this examination
the student advances to candidacy for the Ph.D.
5. Submission and successful defense of a formal Ph.D. Dissertation: Within
one semester of passing the preliminary oral examination, the candidate
must submit to his or her Ph.D. dissertation committee a proposal
outlining an original NanoSciences/NanoEngineering research project
constituting a Ph.D. dissertation. The candidate must describe the
motivation and background for the dissertation; the critical milestones for
completing relevant research tasks; and a statement of work outlining a
specific research plan. The five-person Ph.D. dissertation committee
consists of at least three members of the CNSE faculty (including the
candidate's advisor) and at least one outside member (University at
Albany faculty outside the CNSE, or a CNSE research partner).
Upon timely completion of the Ph.D. dissertation research project the
candidate prepares a dissertation and submits the final draft to the
dissertation committee. The committee ascertains the suitability of the
draft and recommends amendments which the candidate must complete
before the final defense is scheduled. Once approved by the committee,
permission is granted for the candidate to present and defend his
dissertation in a public seminar.
6. Ph.D. Publication Requirement: For successful completion of the Ph.D.
degree requirements, students are also required to be the first author on a
minimum of two scientific publications that have already been accepted
for publication in recognized peer-reviewed technical journals that are
related to the their concentration area.
II.A Proposed revision to the Ph.D. in Nanoscience and Nanoengineering
:
It is proposed to separate the Ph.D. degree program in Nanoscience and Nanoengineering into
respective Ph.D. degree programs in Nanoscale Science and Nanoscale Engineering.
Revised requirements for Ph.D. in Nanoscale Science:
1.
Students admitted with an appropriate Bachelor's degree shall complete 60 credit
hours of academic coursework in partial fulfillment of the Ph.D. degree requirements.
1a. 36 credit hours CNSE coursework at the 500 level or higher with the following
provisions:
1.a.i. Completion of the 12 credit hours (four-course) “Foundations of
Nanotechnology” sequence.
1.a.ii. Completion of at least 9 credit hours of 600 or higher level coursework as
advised relevant to a CNSE Nanoscale Science Track.
1b. 9 credit hours of seminar/external courses.
1c. 15 credit hours of Ph.D. dissertation research.
2.
Students admitted with an appropriate Masters of Science degree shall complete 36
credit hours of academic coursework in partial fulfillment of the Ph.D. degree
requirements.
2.a. 15 credit hours CNSE coursework at the 500 level or higher with the following
provisions:
2.a.i. Completion of “Foundations of Nanotechnology” course sequence for which the
student did not receive course equivalency upon matriculation into the Nanoscale
Science Ph.D. program.
2.a.ii. Completion of at least 6 credits hours of 600 or higher
level coursework as advised relevant to a CNSE Nanoscale
Science Track.
2.b. 6 credit hours of seminar/external courses.
2.c. 15 credit hours of Ph.D. dissertation research.
3. Preliminary Written Examination for Formal Admission to the Nanoscale Science Ph.D.
program: Admission to the Nanoscale Science Ph.D. program requires successful
completion of a preliminary written examination covering fundamental topics in
Nanoscale Science. The exam will be offered yearly and must be passed within two
attempts to maintain academic standing in the Nanoscale Science Ph.D. program.
4.
Preliminary Oral Examination for completion of the Nanoscale Science Ph.D. degree:
Normally, within 2 semesters of passing the preliminary written examination, students
in the Nanoscale Science Ph.D. program must take and pass a preliminary oral
examination relevant to a Nanoscale Science Track. Successful completion of the
preliminary oral examination is determined by a five-member oral examination
committee. This committee consists of at least three members of the CNSE faculty
(including the student's advisor who serves as chair) and at least one outside member
(University at Albany faculty outside CNSE, or CNSE research partner). Upon passing
this examination the student advances to candidacy for the Nanoscale Science Ph.D.
5.
Submission and successful defense of a formal Ph.D. Dissertation: unchanged from
existing Ph.D. requirement.
6.
Ph.D. Publication Requirement: unchanged from existing Ph.D.
requirement.
II.B Proposed revision to the Ph.D. in Nanoscience and Nanoengineering
:
Revised requirements for Ph.D. in Nanoscale Engineering:
1.
Students admitted with an appropriate Bachelor's degree shall complete 60 credit
hours of academic coursework in partial fulfillment of the Ph.D. degree requirements.
1a. 36 credit hours CNSE coursework at the 500 level or higher with the following
provisions:
1.a.i. Completion of the 12 credit hours “Foundations of Nanotechnology” course
sequence.
1.a.ii. Completion of at least 9 credit hours of 600 or higher level coursework as
advised relevant to a CNSE Nanoscale Engineering Track.
1b. 9 credit hours of seminar/external courses.
1c. 15 credit hours of Ph.D. dissertation research.
2.
Students admitted with an appropriate Masters of Science degree shall complete 36
credit hours of academic coursework in partial fulfillment of the Ph.D. degree
requirements.
2.a. 15 credit hours CNSE coursework at the 500 level or higher with the following
provisions:
2.a.i. Completion of “Foundations of Nanotechnology” course sequence for which the
student did not receive course equivalency upon matriculation into the Nanoscale
Science Ph.D. program.
2.a.ii. Completion of at least 6 credits in the student’s specific Nanoscale Engineering
Track.
2.b. 6 credit hours of seminar/external courses.
2.c. 15 credit hours of Ph.D. dissertation research.
3.
Preliminary Written Examination for Formal Admission to the Nanoscale Engineering
Ph.D. program: Admission to the Nanoscale Engineering Ph.D. program requires
successful completion of a preliminary written examination covering fundamental
topics in Nanoscale Science. The exam will be offered yearly and must be passed
within two attempts to maintain academic standing in the Nanoscale Engineering
Ph.D. program.
4.
Preliminary Oral Examination for completion of the Nanoscale Engineering Ph.D.
degree: Normally, within 2 semesters of passing the preliminary written examination,
students in the Nanoscale Engineering Ph.D. program must take and pass a
preliminary oral examination relevant to a Nanoscale Engineering Track. Successful
completion of the preliminary oral examination is determined by a five-member oral
examination committee. This committee consists of at least three members of the
CNSE faculty (including the student's advisor who serves as chair) and at least one
outside member (University at Albany faculty outside CNSE, or CNSE research
partner). Upon passing this examination the student advances to candidacy for the
Nanoscale Engineering Ph.D.
5.
Submission and successful defense of a formal Ph.D. Dissertation: unchanged from
existing Ph.D. requirement.
6.
Ph.D. Publication Requirement: unchanged from existing Ph.D. requirement.
4)
Description of new courses:
Foundations of Nanotechnology Sequence:
Nanotechnology is highly interdisciplinary, building upon core competencies from many traditional
disciplines, including materials science, chemistry, physics, biology and electrical engineering. Because of
this fact, and because the undergraduate backgrounds of CNSE students are equally diverse, a “one size fits
all” approach to course content and design is neither practical nor desirable. Equally, it is not feasible to
require students to take full-semester courses in other academic units on campus in order to be exposed to
the fraction of material that is salient to their needs.
To address these issues, a sequence of modular core courses “Foundations of Nanotechnology” has been
designed to provide students with the particular core competencies they did not acquire in their respective
undergraduate programs, as well as to prepare them for their more specialized advanced coursework and
individual research in the various CNSE Nanoscale Science and Nanoscale Engineering Tracks.
The Foundations of Nanotechnology sequence consists of four courses (Foundations of Nanotechnology I –
IV), with two to be offered in the Fall semester and two in the Spring semester. Each course consists of
coordinated modules specifically sequenced to provide the fundamental academic acumen and core
competencies necessary for students entering the fields of Nansocale Science and Engineering. A Ph.D.
student must complete 12 modules to satisfy the Foundations of Nanotechnology course sequence
requirement [see Section 3]. Critical aspects of the “Foundations” sequence are as follows:
a)
Each course (Foundations of Nanotechnology I – IV) will consist of five “modules” with each
module designed to address a core competency for CNSE graduate study. Each module would be
typically allocated 15 lecture hours in the semester. A list of the 20 modules is shown below.
Bulletin-compatible descriptions and corresponding course numbers provided in Appendix B.
b)
Students must successfully complete an average of three modules per course so by the end of the
Foundations sequence a Ph.D. student will have earned 12 credits of coursework toward his/their
degree requirements.
c)
Individual modules will be taught on a rotating basis by CNSE faculty members.
Foundations of Nanotechnology: Module titles (see Appendix B for descriptions)
Nanoscale Analytic Techniques
Noncrystalline and Soft Materials
Crystallography and Diffraction
Optical/Photonic Properties
Deposition Techniques for Ultra-Thin Films
Particle – Solid Interactions
Nanoscale Device Principles
Phase Equilibria for Nanoscale Systems
Nanoscale Electronic and Magnetic Properties
Practical Modeling
Introduction to NEMS/MEMS
Practical Solid State Quantum Theory
Nanoscale Kinetics and Transport
Solid State Quantum Theory IA
Mathematical Methods in Research
Solid State Quantum Theory IB
Nanoscale Mechanics of Materials
Science of Nanoscale Laboratory Techniques
Molecular Materials
Nanoscale Surfaces and Interfaces
New 600-level Courses: (for full course bulletin entry see Appendix C)
CNSE 603 Nanoscale Materials Processing (3 Cr)
CNSE 604 Plasma Processing of Materials (3 Cr)
CNSE 607 FabLab (3 Cr)
CNSE 611 Introduction to Optics (3 Cr)
CNSE 612 Optical Processes in Solids (3 Cr)
CNSE 613 Practical Optoelectronics: Design, Fabrication, and System Integration (3 Cr)
CNSE 640--NanoTechnology and Photovoltaics (3 Cr)
CNSE 642--Advanced Fuel Cells (3 Cr)
CNSE 643--Power Electronics (3 Cr)
CNSE 651 Fundamentals of Lithography I (3 Cr)
CNSE 652 Fundamentals of Lithography II (3 Cr)
CNSE 653 Advanced Optics (3 Cr)
CNSE 654 Charged Particle Optics (3 Cr)
CNSE 655 Resist Chemistry and Processing (3 Cr)
CNSE 656 Alternative and Experimental Lithographies (3 Cr)
CNSE 660 Semiconductor Metrology and Defect Analysis (3 Cr)
CNSE 673 X-ray Scattering Techniques and Crystallography (3 Cr)
CNSE 674 Focused Ion Beam Technology (3 Cr)
5)
New faculty:
No new faculty will be needed for the proposed revisions.
6)
Additional costs:
No additional costs for the proposed revisions are anticipated.
7)
Effective date:
The proposed revisions will take effect in the Fall 2006 academic semester.
Appendix A
Proposed Nanoscale Science and Nanoscale Engineering
Track Descriptions
Nanoscale Science Tracks for M.S. and Ph. D. Degree Programs
Molecular Materials and Architectures: Fundamental material properties of molecular dots, wires, and
crystals, quantum confinement and ballistic transport based device structures, and the integration of
molecular/electronic materials in nanodevice geometries. Advanced theoretical and computer simulation
treatments of nanoscale optical, electronic, elastic, and thermodynamic properties.
Optoelectronic Materials and Architectures: Compound semiconductor material properties and
fundamentals of compound semiconductor ultra-thin-film growth for optical and optoelectronic
applications. Quantum confinement-based optical and optoelectronic properties. Optical and optoelectronic
device architectures using single and compound semiconductors.
Spintronic Materials and Architectures: Compound semiconductor material properties and fundamentals
of compound semiconductor thin-film growth for spintronic applications. Magnetic and Nanomagnetic
device architectures using single and compound semiconductors.
Ultra-Thin Film Single and Multilayered Nanomaterial Structures: Self-assembly, deposition,
modification, and integration of single and multilayered thin film materials. Fundamental functionality
relationships between nanoscale structures and dimensions and resulting film properties.
Nanoscale Materials Characterization, Analysis, and Metrology: Advanced nanoscale photon, ion, and
electron based microscopic and spectroscopic analytical techniques and process metrologies for atomic and
molecular-level material properties of ultra-thin films, nanomaterials and nanoscale devices and systems.
Nanomaterials for Nanotechnology: The science of design, deposition, and integration of atomic and
molecular-level nanoengineered materials for nanotechnology-based applications.
Economic Impacts of Nanoscale Science and Nanotechnology: In-depth technical analysis of
educational, workforce, and economic impacts of emerging nanoscale systems and architectures.
Theoretical modeling and simulation studies of the technical impact of emerging nanoscale science
concepts and disruptive nanotechnologies.
Nanoscale Engineering Tracks
for M.S. and Ph. D. Degree Programs
Nanoelectronics Engineering and Technology: Design, Processing, fabrication, testing, and integration of
nanoelectronic structures and devices for incorporation in emerging gigascale and terascale integrated
circuit systems and architectures. Development of integrated process modules for novel nanoelectronics
materials.
Optoelectronics and Photonics Nanoengineering: Design, fabrication, testing, and integration of
integrated optoelectronic and photonic device structures using compound semiconductors. Testing and
hybridization of optoelectronic/photonic devices in system-on-a-chip (SOC) and nano-electro-mechanical
system (NEMS) architectures.
Spintronics Nanoengineering: Design, fabrication, testing, and integration of spintronic device structures.
Testing and hybridization of spintronic devices, including incorporation in system-on-a-chip (SOC) and
nano-electro-mechanical system (NEMS) architectures.
NanoSystem Engineering and Technology: Design, fabrication, packaging, and testing of nano/micro-
electrical and nano/micro-opto-electrical mechanical components and nano/micro-fluidic components for
incorporation in SOC architectures and systems.
NanoEngineering in Energy & Environmental Technologies: Development of nanotechnology
engineering concepts for new and emerging applications in energy and environmental areas including fuel
cells, solar cells, superconductors, sensors, power electronics, and supercapacitors.
Nanolithography Engineering and Technology:
Design, development and engineering of
nanolithography systems, components, and processes. Development and engineering of materials and
metrologies for nanolithography.
Nanobiology Engineering and Technology: Design, development and engineering of nanobiological
systems, components, and processes. Development and engineering of biomaterials and nano-bio-systems
for SOC, nanomedicine, and health applications.
Appendix B
Module
Descriptions:
Foundations
of
Nanotechnology I - IV
Foundations of Nanotechnology Descriptions
CNSE 501: Foundations of Nanotechnology I (1-5 Cr)
Crystallography and Diffraction
Fundamental descriptions of crystalline materials structure and determination.
Phase Equilibria for Nanoscale Systems
First, second, and third laws of thermodynamics as applied to nanoscale systems; activity and
the equilibrium constant; solutions; phase relations (including the phase rule); heterogeneous
equilibria; free-energy-composition diagrams and their relation to phase transitions; phase
diagrams.
Nanoscale Kinetics and Transport
Discussion of time-dependent mass transport in nanomaterials system through a formal
treatment of diffusion theory.
Practical Solid State Quantum Theory
Practical descriptions of how physical properties and behaviors of materials become
dominated by quantum effects as length scales approach atomic dimensions.
Nanoscale Mechanics of Materials
Introduction to atomic and continuum scale mechanics appropriate to nanoscale systems and
assemblies, including the role of defects.
CNSE 502: Foundations of Nanotechnology II (1-5 Cr)
Mathematical Methods in Research
Introduction to the critical mathematical tools needed for research and education in
nanotechnology.
Practical Modeling
Principles of modeling structures and processes at the nanometer scale, including meshing
techniques, finite element analysis, and molecular dynamics.
Solid State Quantum Theory IA
Introduction to the quantum theory of nanoscale material systems and devices.
Molecular Materials
Structure, chemistry, thermodynamics and physical properties of long chain molecules and
molecular structures, including polymers, electronic polymers, proteins, carbon nanotubes and
fullerenes.
Science of Nanoscale Laboratory Techniques
Overview of the scientific basis of key technologies in experimental nanotechnology research,
including laboratory safety.
CNSE 503: Foundations of Nanotechnology III (1-5 Cr)
Particle – Solid Interactions
Interaction of high energy photons, electrons, and ions with matter in the context of atomic
scale characterization.
Nanoscale Analytic Techniques
Physical basis of the major analytical methods used for nanoscale materials analysis.
Nanoscale Electronic and Magnetic Properties
Description and atomic scale origins of the electronic and magnetic properties of matter.
Optical/Photonic Properties
The interactions between electromagnetic waves and matter (molecules, thin films, and bulk
materials) is treated with particular attention to the increasing role of quantum effects as
length scales approach atomic dimensions.
Solid State Quantum Theory IB
Quantum origins of physical properties in nanometer scale systems.
CNSE 504: Foundations of Nanotechnology IV (1-5 Cr)
Deposition Techniques for Ultra-Thin Films
Overview of important deposition methods used in nanomaterials synthesis.
Nanoscale Device Principles
The physical principles underlying the design and operation of modern electronic and
optoelectronic devices.
Noncrystalline and Soft Materials
Introduction of the amorphous state including the structure of liquids and glassy solids.
Intrudocution to soft materials including biological films, membranes and membrane
polymers, liquid crystals and colloids.
Introduction to NEMS/MEMS
Design fundamentals of nanometer scale electro-mechanical systems
Nanoscale Surfaces and Interfaces
Introduction to surface structure, properties, thermodynamics and analysis and their role in
nanotechnology.
Appendix C
Course Descriptions for New Courses for Graduate Study in
Nanoscale Science and Nanoscale Engineering
CNSE 603 Processing of Nanoscale Materials (3)
Fundamentals of thin film and nanostructured materials. Kinetics, heterogeneous reactions, reaction
pathways, nucleation. Plasma-enhanced techniques, plasma promoted nucleation. Atomic layer deposition
fundamentals. Half-reactions, adsorption kinetics, by-product volatilization. Material characterization
techniques. Safety and hardware considerations. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 604 Plasma Processing of Materials (3)
Fundamental physical aspects of processing plasmas. The chemistry of plasmas. Hardware considerations
in plasma processing. Specific plasma processing applications: Surface preparation and cleaning, reactive
ion etching, sputtering, PECVD, and PEALD. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 607 FabLab (3)
Real world teaming-based laboratory course. Students form teams to design, build, and test an actual device
that operates based on the physical principles of nanotechnology in the CNSE/ANT facilities. Students will
have at least one Industry/Research partner and one CNSE faculty as instructors. Prerequisites:
Foundations sequence, permission of instructor; offered annually.
CNSE 611 Introduction to Optics (3)
Basic optics. Introduction to Fourier Optics, Statistical Optics, Aberration Theory. Prerequisites:
Foundations sequence, permission of instructor; offered annually.
CNSE 612 Optical Processes in Solids (3)
Topics include modeling of dielectronic functions, optical absoption, energy transfer and recombination
processes, elementary excitations, elecro-optic and magneto-optic effects, selection rules of optical
transitions, waveguides, and photonic crystals. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 613 Practical Optoelectronics : Design, Fabrication and System Integration (3)
Topics include optoelctronic components design and fabrication, monolithic and hybrid integration between
photonics and electronic components and associated challenges. Prerequisites: Foundations sequence,
permission of instructor; offered annually.
CNSE 640 NanoTechnology and Photovoltaics (3)
Topics focus on the application of nanoengineered materials and structures to photovoltaic technologies and
include impact on performance and operation. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 642 Advanced Fuel Cells (3)
Topics focus on application of nanomaterials integration in and nanoengineering of emerging fuel cell
geometries and concepts. Prerequisites: Foundations sequence, permission of instructor; offered annually.
CNSE 643 Power Electronics (3)
Topics focus on emerging concepts in device design and nanomaterials integration in power electronic
system architectures. Prerequisites: Foundations sequence, permission of instructor; offered annually.
CNSE 651 Fundamentals of Lithography I (3)
Fundamental concepts and practices in lithographic processing. Topics include resist fundamentals, track
systems, and scanner technology - based on classic text by Levinson. Prerequisites: Foundations sequence,
permission of instructor; offered annually.
CNSE 652 Fundamentals of Lithography II (3)
Design data creation and manipulation. Mask making. Metrology and inspection for lithography.
Prerequisites: Foundations sequence, permission of instructor; offered annually.
CNSE 653 Advanced Optics (3)
Fourier Optics. Statistical Optics. Aberration Theory. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 654 Charged Particle Optics (3)
Fundamentals of charged particle optics including conventional and immersion lens approaches to
focusing. Aberration theory and source technology. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 655 Resist Chemistry and Processing (3)
Fundamentals of advanced resist chemistries and processing. Includes survey of negative and positive
resists and application of chemically amplified resists. Prerequisites: Foundations sequence, permission of
instructor; offered annually.
CNSE 656 Alternative and Experimental Lithographies (3)
Survey of alternative projection lithography, soft lithography, and direct write lithography for nanoscale
patterning. Prerequisites: Foundations sequence, permission of instructor; offered annually.
CNSE 660 Semiconductor Metrology and Defect Analysis (3 Cr)
A detailed overview of current characterization methods critical to transistor fabrication, on-chip
interconnection, lithography, defect detection and characterization, and process yield analysis. This course
would cover the myriad techniques in use in or near semiconductor fabrication facilities that are critical to
achieving acceptable process yields. This course would look at how metrology tools of the type described
in SNN 661 would be actually used to solve real world manufacturing problems. Emphasis would be placed
on how to determine whether fabrication processes are correctly working and when they are not and how to
do root cause analysis. Therefore the course would include descriptions of key fabrication processes
encountered in real fabrication facilities. Prerequisites: Foundations sequence, permission of instructor;
offered annually.
CNSE 673: X-ray Scattering Techniques and Crystallography (3)
Application of advanced x-ray scattering and diffraction techniques for the investigation of nanomaterials,
nanodevice structures, and nanoscale modulated systems. Prerequisites: Foundations sequence, permission
of instructor; offered annually.
CNSE 674: Focused Ion Beam Technology (3)
In-depth review of current focused ion beam technologies as developed for 3D
tomographic imaging, defect review, circuit repair, and TEM sample preparation.
Prerequisites: Foundations sequence, permission of instructor; offered annually.
